Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation

Abstract This article presents the application and evaluation of a cantilever with integrated sensing actuation as part an atomic force microscope (AFM) adjustable probe direction, which is into nano measuring machine (NMM-1). The AFM, operated in closed-loop intermittent contact mode, based on two rotational axes that enable adjustment direction to cover complete hemisphere. greatly enlarge metrology frame system by materials comparatively high coefficient thermal expansion, ultimately limits achievable measurement uncertainty system. Thus, reduce sensitivity system, redesign kinematics mandatory. However, this article, some preliminary investigations self-sensing micro heater for its stimulation will be presented. In previous investigations, piezoelectric actuator has been applied stimulate cantilever. removal actuator, enabled heater, promises essential simplification sensor holder. future it might possible use low are often difficult therefore only allow rather simple geometries. Furthermore, because creepage actuators, their from lead improved metrological characteristics. As shown, there no significant differences between modes actuation. Therefore, redesigned